The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2013
Filed:
Mar. 27, 2009
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Lucas Henricus Johannes Stevens, Eindhoven, NL;
Abraham Veefkind, Noordwijk, NL;
Peter Gerhardus Wihelmus Bussink, 's-Gravenhage, NL;
Egbert Anne Martijn Brouwer, Zoetermeer, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Lucas Henricus Johannes Stevens, Eindhoven, NL;
Abraham Veefkind, Noordwijk, NL;
Peter Gerhardus Wihelmus Bussink, 's-Gravenhage, NL;
Egbert Anne Martijn Brouwer, Zoetermeer, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus includes a vessel that encloses a component with a test surface to be probed for contamination control; and an optical probe configured to transmit and receive an optical probing beam. The vessel includes a first optical port configured to transfer the optical probing beam towards the test surface, and a second optical port configured to receive a reflected optical probing beam. The optical probe includes a light source configured to provide the optical probing beam, a polarization conditioner configured to provide a predefined polarization state to the probing beam, and a spectral analyzer. The polarization conditioner is preset to provide a minimal transmission for a minimal transmission wavelength, and the spectral analyzer is arranged to detect a wavelength shift of the minimal transmission wavelength in response to a polarization change due to the presence of contamination.