The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2013
Filed:
Jul. 05, 2012
Applicant:
Dmytro Chumakov, Dresden, DE;
Inventor:
Dmytro Chumakov, Dresden, DE;
Assignee:
GLOBLFOUNDRIES, Inc., Grand Cayman, KY;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
An integrated circuit having a place-efficient capacitor includes a lower capacitor electrode having a surface area comprised of an inner surface area of a partial opening and a via opening formed in a patterned dielectric layer on a semiconductor substrate, a capacitor insulating layer overlying the lower capacitor electrode, and an upper capacitor electrode including a metal fill material filling the partial opening and the via opening and having a surface area that includes the inner surface area of the partial opening and via opening.