The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2013
Filed:
Jan. 20, 2012
Ying Zhang, Hsinchu, TW;
Tien-chih Cheng, Hsinchu, TW;
Shu-huei Suen, Jhudong Township, TW;
Yu-cheng Liu, Zhubei, TW;
Jian-huah Chiou, New Taipei, TW;
Ying Zhang, Hsinchu, TW;
Tien-Chih Cheng, Hsinchu, TW;
Shu-Huei Suen, Jhudong Township, TW;
Yu-Cheng Liu, Zhubei, TW;
Jian-Huah Chiou, New Taipei, TW;
Abstract
A wafer transport pod for storing or transporting semiconductor wafers during semiconductor wafer processing includes a body having a top panel, a bottom panel, a back panel, two side panels and a front panel. The two side panels are configured for receiving the semiconductor wafers therebetween. The two side panels have a plurality of separately hermetically sealed partitions inside the body, any two of the sealed partitions for sealing a wafer therebetween and for preventing wafer contamination. The front panel provides ingress and egress for the semiconductor wafers to and from the wafer transport pod.