The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2013
Filed:
Jul. 26, 2011
Gerd Benner, Aalen, DE;
Harald Niebel, Oberkochen, DE;
Gerd Benner, Aalen, DE;
Harald Niebel, Oberkochen, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A charged particle beam system for performing precession diffraction includes a lensfor focusing a beamin an object plane, and an objective lenshaving a diffraction plane. A doubletof lensesimages the diffraction planeinto an intermediate diffraction planewhere a multipoleis located. A doubletof lensesimages the intermediate diffraction planeinto an intermediate diffraction planewhere a multipoleis located. A first deflection systemupstream of the object planecan tilt to change an angle of incidence of the beam on the object plane. A second deflection systembetween lensesandtilts the beam such that the change of the angle of incidence of the charged particle beam on the object plane is compensated.