The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2013
Filed:
Aug. 08, 2003
Applicants:
Armin Kübelbeck, Bensheim, DE;
Sylke Klein, Rossdorf, DE;
Werner Stockum, Reinheim, DE;
Inventors:
Assignee:
Merck Patent GmbH, Darmstadt, DE;
Primary Examiner:
Int. Cl.
CPC ...
C03C 15/00 (2006.01); C25F 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to novel etching media in the form of etching pastes for etching selected areas or the entire area of silicon surfaces and layers, in addition to the use of said media.