The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2013
Filed:
Sep. 23, 2011
Neil Judell, Newtonville, MA (US);
Ian T. Kohl, Rio Rancho, NM (US);
Songping Gao, Southborough, MA (US);
Richard E. Bills, Tucson, AZ (US);
Neil Judell, Newtonville, MA (US);
Ian T. Kohl, Rio Rancho, NM (US);
Songping Gao, Southborough, MA (US);
Richard E. Bills, Tucson, AZ (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.