The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2013
Filed:
Jun. 12, 2012
Applicants:
Ravichandra V Palaparthi, Newark, DE (US);
Richard D Hreha, Beavercreek, OH (US);
Benjamin John Vining, Beavercreek, OH (US);
Inventors:
Ravichandra V Palaparthi, Newark, DE (US);
Richard D Hreha, Beavercreek, OH (US);
Benjamin John Vining, Beavercreek, OH (US);
Assignee:
Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, DE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 7/22 (2006.01); B24D 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of making shape memory chemical mechanical polishing pads is provided, wherein the shape memory chemical mechanical polishing pads comprise a polishing layer in a densified state. Also provided is a method for using the shape memory chemical mechanical polishing pads to polish substrates.