The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2013
Filed:
May. 26, 2010
Kyoichi Mori, Kodama-gun, JP;
Noritake Shizawa, Kodama-gun, JP;
Naoaki Yamashita, Kodama-gun, JP;
Koji Tsushima, Kodama-gun, JP;
Toshimitsu Shiraishi, Kodama-gun, JP;
Kyoichi Mori, Kodama-gun, JP;
Noritake Shizawa, Kodama-gun, JP;
Naoaki Yamashita, Kodama-gun, JP;
Koji Tsushima, Kodama-gun, JP;
Toshimitsu Shiraishi, Kodama-gun, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A fine-structure transfer apparatus has a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post. The stamper is supported at the other end in a vertically movable manner by means of an ascending/descending unit provided on the second post. A transfer element holding stage is provided on the upper surface of the base plate between the first and second posts in a position that corresponds to the position of the lower surface of the elongated stamper where a fine pattern is formed. A pressure-applying unit is provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction thereof. The transfer apparatus is characterized by the ease with which the stamper can be detached from the transfer element.