The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Apr. 14, 2010
Dale K. Stone, Lynnfield, MA (US);
Lyudmila Stone, Lynnfield, MA (US);
Klaus Petry, Merrimac, MA (US);
David E. Suuronen, Newburyport, MA (US);
Julian G. Blake, Gloucester, MA (US);
Dale K. Stone, Lynnfield, MA (US);
Lyudmila Stone, Lynnfield, MA (US);
Klaus Petry, Merrimac, MA (US);
David E. Suuronen, Newburyport, MA (US);
Julian G. Blake, Gloucester, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
An electrostatic clamp, which more effectively removes built up charge from a substrate prior to and during removal, is disclosed. Currently, the lift pins and ground pins are the only mechanisms used to remove charge from the substrate after implantation. The present discloses describes a clamp having one of more additional low resistance paths to ground. These additional conduits allow built up charge to be dissipated prior to and during the removal of the substrate from the clamp. By providing sufficient charge drainage from the backside surface of the substrate, the problem whereby the substrate sticks to the clamp can be reduced. This results in a corresponding reduction in substrate breakage.