The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Feb. 28, 2011
Applicant:
Hiroshi Nagaike, Yamanashi, JP;
Inventor:
Hiroshi Nagaike, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided a particle number measurement method capable of accurately measuring the number of particles generated by a specific factor. When the number of particles is measured by irradiating laser beaminto a main exhaust linevia a glass window, receiving lights (Land L) scattered from particles (Pand P) crossing with the laser beamby a photodetector, and calculating the number of particles based on the received scattered light, static particles Pare considered as contaminants attached to the glass windowand the number of static particles Pis subtracted from the measured number of particles within the main exhaust line