The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Nov. 11, 2008
Bernd Spruck, Mögglingen, DE;
Martin Edelmann, Aalen, DE;
John Craven, Swavesey, GB;
Robert Taylor, Cambridge, GB;
Martin Kühner, Bad Klosterlausnitz, DE;
Bernd Spruck, Mögglingen, DE;
Martin Edelmann, Aalen, DE;
John Craven, Swavesey, GB;
Robert Taylor, Cambridge, GB;
Martin Kühner, Bad Klosterlausnitz, DE;
Carl Zeiss NTS Limited, Cambridge, GB;
Abstract
A beam device, in particular a particle beam device, for analyzing an object is provided, as well as a system comprising a particle beam device and an optical microscope for optically analyzing an object. The beam device simplifies the exchange and reduces the time of the exchange of objects to be examined. The beam device includes at least one beam generator that generates a beam, at least one objective lens that focuses the beam on an object arranged in a holding element. The objective lens comprises at least one connecting element. The holding element may be connected to the connecting element so that the holding element is removable from the connecting element for modification of the object. Alternatively, the holding element may be mounted to a beam column.