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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8524851 B1

PDFFull Text
Date of Patent:
Sep. 03, 2013

Filed:

Jul. 12, 2010

Silicon-based hardmask composition and process of producing semiconductor integrated circuit device using the same

Applicants:

Sang Kyun Kim, Uiwang-si, KR;

Hyeon MO Cho, Uiwang-si, KR;

Sang Ran Koh, Uiwang-si, KR;

MI Young Kim, Uiwang-si, KR;

Hui Chan Yun, Uiwang-si, KR;

Yong Jin Chung, Uiwang-si, KR;

Jong Seob Kim, Uiwang-si, KR;

Inventors:

Sang Kyun Kim, Uiwang-si, KR;

Hyeon Mo Cho, Uiwang-si, KR;

Sang Ran Koh, Uiwang-si, KR;

Mi Young Kim, Uiwang-si, KR;

Hui Chan Yun, Uiwang-si, KR;

Yong Jin Chung, Uiwang-si, KR;

Jong Seob Kim, Uiwang-si, KR;

Assignee:

Cheil Industries, Inc., Gumi-si, Kyeongsangbuk-do, KR;

Attorney:

Lee & Morse, P.C.

Primary Examiner:

Margaret Moore

Int. Cl.
CPC ...
C08G 77/60 (2006.01);
U.S. Cl.
CPC ...
Abstract

A silicon-based hardmask composition, including an organosilane polymer represented by Formula 1:{(SiO—Y—SiO)(RSiO)(XSiO)}(OH)(OR)  (1).

Find Patent Forward Citations

Kim, Sang. (2013). Silicon-based hardmask composition and process of producing semiconductor integrated circuit device using the same (U.S. Patent No. 8524851). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8524851

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