The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Jul. 28, 2011
Applicant:
Masahiro Nishi, Kanagawa, JP;
Inventor:
Masahiro Nishi, Kanagawa, JP;
Assignee:
Sumitomo Electric Device Innovations, Inc., Yokohama-shi, Kanagawa, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/318 (2006.01); C23C 8/02 (2006.01); H01L 21/8252 (2006.01);
U.S. Cl.
CPC ...
C23C 8/02 (2013.01);
Abstract
A method for fabricating a semiconductor device including performing oxygen plasma treatment to a surface of a nitride semiconductor layer, a power density of the oxygen plasma treatment being 0.2 to 0.3 W/cm.