The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Jan. 03, 2011
Yuko Yamashita, Toyonaka, JP;
Nobuo Ando, Toyonaka, JP;
Yuko Yamashita, Toyonaka, JP;
Nobuo Ando, Toyonaka, JP;
Sumitomo Chemical Company, Limited, Tokyo, JP;
Abstract
The present invention provides a photoresist composition comprising a resin which comprises a structural unit represented by the formula (I): wherein Qand Qindependently represent a fluorine atom etc., U represents a C1-C20 divalent hydrocarbon group etc., Xrepresents —O—CO— etc., and Arepresents an organic counter ion, and a compound represented by the formula (D'): wherein R, R, Rand Rindependently represent a C1-C20 alkyl group etc., and Arepresents a C1-C36 saturated cyclic hydrocarbon group which may have one or more substituents and which may contain one or more heteroatoms.