The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Apr. 22, 2010
Toshiyuki Naoi, Utsunomiya, JP;
Seima Kato, Utsunomiya, JP;
Naoki Kohara, Utsunomiya, JP;
Chidane Ouchi, Utsunomiya, JP;
Toshiyuki Naoi, Utsunomiya, JP;
Seima Kato, Utsunomiya, JP;
Naoki Kohara, Utsunomiya, JP;
Chidane Ouchi, Utsunomiya, JP;
Canon Kabushiki Kaisha, , JP;
Abstract
A Talbot interferometer includes a diffraction grating, an image pickup device, a moving unit configured to move at least one of the diffraction grating and the image pickup device in an optical axis direction of the test object, and a computer configured to adjust a position of the at least one of the diffraction grating and the image pickup device using the moving unit so that a Talbot condition can be met, based on a spatial frequency spectrum obtained from a plurality of interference fringes captured by the image pickup device while moving the at least one of the diffraction grating and the image pickup device using the moving unit.