The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Sep. 29, 2008
Jaehyun Kim, Fremont, CA (US);
Arthur H. Sato, San Jose, CA (US);
Keith Comendant, Fremont, CA (US);
Qing Liu, Austin, TX (US);
Feiyang Wu, San Francisco, CA (US);
Jaehyun Kim, Fremont, CA (US);
Arthur H. Sato, San Jose, CA (US);
Keith Comendant, Fremont, CA (US);
Qing Liu, Austin, TX (US);
Feiyang Wu, San Francisco, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.