The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Jun. 14, 2011
Applicant:
Yoshihisa Matsubara, Kanagawa, JP;
Inventor:
Yoshihisa Matsubara, Kanagawa, JP;
Assignee:
Renesas Electronics Corporation, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01);
U.S. Cl.
CPC ...
Abstract
Unless layers over a TEG pattern are removed, a test using the TEG pattern is conducted. Multiple wiring layers are formed over a first TEG pattern. A wiring and multiple dummy patterns are formed in each of the wiring layers. An electrode pad is formed in an uppermost wiring layer. In a planar view, the first TEG pattern eliminates overlap with all of the wirings and the dummy patterns.