The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Oct. 03, 2011
Huang Liu, Singapore, SG;
Alex Kai Hung See, Singapore, SG;
Hai Cong, Singapore, SG;
Zheng Zou, Singapore, SG;
Huang Liu, Singapore, SG;
Alex Kai Hung See, Singapore, SG;
Hai Cong, Singapore, SG;
Zheng Zou, Singapore, SG;
GLOBALFOUNDRIES Singapore Pte. Ltd., Singapore, SG;
Abstract
A memory device is fabricated through the integration of embedded non-volatile memory (eNVM) with replacement metal gate (RMG) and high-k/metal gate (HKMG) modules. Embodiments include forming two substrate portions having upper surfaces at different heights, forming non-volatile gate stacks over the substrate portion with the lower upper surface, and forming high-voltage gate stacks and logic gate stacks over the other substrate portion. Embodiments include the upper surfaces of the non-voltage gate stacks, the high-voltage gate stacks, and the logic gate stacks being substantially coplanar.