The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Aug. 27, 2012
Rujee Lorpitthaya, Singapore, SG;
Selvaraj Palanisamy Chinnathambi, Taman Jurong, SG;
Haresh Siriwardane, Woodlands, SG;
Rujee Lorpitthaya, Singapore, SG;
Selvaraj Palanisamy Chinnathambi, Taman Jurong, SG;
Haresh Siriwardane, Woodlands, SG;
Cabot Microelectronics Corporation, Aurora, IL (US);
Abstract
The invention provides a polishing composition that contains (a) an abrasive comprising (i) first alpha alumina particles that have an average aspect ratio of 0.8:1 to 1.2:1, (ii) second alpha alumina that have an average aspect ratio of greater than 1.2:1, (iii) fumed alumina particles, and (iv) wet-process silica particles, and (b) water. The invention also provides a method of polishing a substrate, especially a nickel-phosphorous substrate, with the polishing composition.