The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Sep. 17, 2010
Masayuki Nara, Tsukuba, JP;
Masayuki Nara, Tsukuba, JP;
Mitutoyo Corporation, Kawasaki, JP;
Abstract
A tracking type laser gauge interferometer includes: a first recursive reflector configured to reflect light parallel to incident light; a second recursive reflector attached to a measurement object; a main body part configured to guide light emitted from a laser light source to the first recursive reflector; a rotating mechanism configured to rotate the main body part; and a control unit configured to control the rotating mechanism based on the light emergent from the main body part and reflected at the second recursive reflector, wherein: the main body part includes a light receiving element configured to receive the light reflected at the first recursive reflector and detect a position of the received light; and the control device includes: an angle acquisition unit configured to acquire a rotational angle of the rotating mechanism; and an correction unit configured to correct a motion error of the rotating mechanism.