The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Oct. 06, 2010
Chunlei Zhang, Santa Clara, CA (US);
Sergio F. Shoji, San Jose, CA (US);
Andrey Semenin, Sunnyvale, CA (US);
Kartik Ramaswamy, San Jose, CA (US);
James P. Cruse, Santa Cruz, CA (US);
Bryan Liao, Saratoga, CA (US);
Chunlei Zhang, Santa Clara, CA (US);
Sergio F. Shoji, San Jose, CA (US);
Andrey Semenin, Sunnyvale, CA (US);
Kartik Ramaswamy, San Jose, CA (US);
James P. Cruse, Santa Cruz, CA (US);
Bryan Liao, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods and apparatus for tuning matching networks are provided herein. A method of tuning a matching network includes providing a matching network coupling an RF source to a load, the matching network having a tunable element disposed at a first set point; increasing a value of the tunable element by a first step above the first set point; sensing a first adjusted value of a reflected RF power; decreasing the value of the tunable element by the first step below the first set point; sensing a second adjusted value of the reflected RF power; comparing the first and the second adjusted values of the reflected RF power; and moving the tunable element to a second set point that corresponds to a position having a lowest adjusted value of the reflected RF power. The method may be repeated until the reflected RF power falls within an acceptable reflected RF power range.