The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Jun. 16, 2009
Applicants:
Kenji Suzuki, Kasugai, JP;
Yukisada Horie, Kasugai, JP;
Katsuhito Kojima, Kasugai, JP;
Inventors:
Assignee:
Fujitsu Semiconductor Limited, Yokohama, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/544 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for generating reticle data for forming a reticle. The method includes recognizing a non-layout region free from main chips in a process pattern, dividing the non-layout region into a plurality of rectangular non-layout regions, generating scribe data using the plurality of divided rectangular non-layout region as a plurality of dummy chips, and generating a dummy pattern for each of the dummy chips.