The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Oct. 21, 2009
Clemens Johannes Gerardus Van Den Dungen, Eindhoven, NL;
Danny Maria Hubertus Philips, Son en Breugel, NL;
Koen Steffens, Veldhoven, NL;
Tijmen Wilfred Mathijs Gunther, Utrecht, NL;
David Bessems, Eindhoven, NL;
Clemens Johannes Gerardus Van Den Dungen, Eindhoven, NL;
Danny Maria Hubertus Philips, Son en Breugel, NL;
Koen Steffens, Veldhoven, NL;
Tijmen Wilfred Mathijs Gunther, Utrecht, NL;
David Bessems, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A fluid handling structure and lithographic apparatus is disclosed in which measures are taken, in particular to the dimensions and spacing of an array of openings in a bottom surface of the fluid handling structure, to deal with and/or prevent formation of bubbles in immersion liquid.