The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
May. 27, 2010
Sey-ping Sun, Hsin-Chu, TW;
Chih-hao Chang, Chu-Bei, TW;
Chao-an Jong, Hisn-Chu, TW;
Tsung-lin Lee, Hsin-Chu, TW;
Chung-ju Lee, Hsin-Chu, TW;
Chin-hsiang Lin, Hsin-Chu, TW;
Sey-Ping Sun, Hsin-Chu, TW;
Chih-Hao Chang, Chu-Bei, TW;
Chao-An Jong, Hisn-Chu, TW;
Tsung-Lin Lee, Hsin-Chu, TW;
Chung-Ju Lee, Hsin-Chu, TW;
Chin-Hsiang Lin, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
An integrated circuit structure includes a semiconductor substrate; a gate stack overlying the semiconductor substrate; a gate spacer on a sidewall of the gate stack; a first contact plug having an inner edge contacting a sidewall of the gate spacer, and a top surface level with a top surface of the gate stack; and a second contact plug over and contacting the first contact plug. The second contact plug has a cross-sectional area smaller than a cross-sectional area of the first contact plug.