The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Apr. 27, 2010
Shunji Shinkawa, Shizuoka, JP;
Kouji Fukushima, Shizuoka, JP;
Shunji Shinkawa, Shizuoka, JP;
Kouji Fukushima, Shizuoka, JP;
NuFlare Technology, Inc., Numazu-shi, JP;
Abstract
A detectormeasures the value of the current formed by reflected electrons generated as a result of irradiation of a reference mark on a substrate with an electron beam, where the reference mark is made of a material having a different reflectance than the substrate. The signal from the detectoris amplified by a detecting unitand converted to a digital signal by an A/D conversion unit. A control computerthen performs averaging processing on the digital signal which is then used for drift compensation by a writing data correcting unit
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile