The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Jul. 13, 2010
Wolfram Buehler, Hermaringen, DE;
Holger Doemer, Bopfingen, DE;
Matthias Lang, Moegglingen, DE;
Joerg Stodolka, Aalen, DE;
Peter Roediger, Vienna, AT;
Emmerich Bertagnolli, Vienna, AT;
Heinz Wanzenboeck, Vienna, AT;
Wolfram Buehler, Hermaringen, DE;
Holger Doemer, Bopfingen, DE;
Matthias Lang, Moegglingen, DE;
Joerg Stodolka, Aalen, DE;
Peter Roediger, Vienna, AT;
Emmerich Bertagnolli, Vienna, AT;
Heinz Wanzenboeck, Vienna, AT;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A particle beam systemfor cleaning itself comprises an irradiation system to direct electromagnetic radiation onto the surfaces to be cleaned and a supply systemto supply a precursor gas to the interior of the vacuum chamberof the particle beam system. The precursor gas is activated in a vicinity of the surfaces to be cleaned and is converted into a reaction gas which reacts with the contaminants present on the irradiated surfaces such that said contaminants may be pumped out then.