The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Feb. 18, 2010
Huirong Yao, Plainsboro, NJ (US);
Guanyang Lin, Whitehouse Station, NJ (US);
Jianhui Shan, Pennington, NJ (US);
Joonyeon Cho, Bridgewater, NJ (US);
Salem K. Mullen, Florham Park, NJ (US);
Huirong Yao, Plainsboro, NJ (US);
Guanyang Lin, Whitehouse Station, NJ (US);
Jianhui Shan, Pennington, NJ (US);
JoonYeon Cho, Bridgewater, NJ (US);
Salem K. Mullen, Florham Park, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
A novel antireflective coating composition is provided, said antireflective coating composition comprising a) a compound of formula 1, b) a thermal acid generator, (c) at least one polymer, wherein Uand Uare independently a C-Calkylene group; V is selected from a C-Calkylene, arylene and aromatic alkylene; W is selected from H, C-Calkyl, aryl, alkylaryl and V—OH; Y is selected from H, W, and UC(O)OW, wherein Uis independently a C-Calkylene group, and m is 1 to 10. Also provided are methods using said compositions as antireflective coatings for substrates in lithographic processes.