The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Jul. 11, 2011
Hyun Kee Lee, Gyunggi-do, KR;
Tae Joon Park, Daejeon, KR;
Sang Kee Yoon, Gyunggi-do, KR;
Hyung Jae Park, Gyunggi-do, KR;
Yeong Gyu Lee, Gyunggi-do, KR;
Heung Woo Park, Gyunggi-do, KR;
Hyun Kee Lee, Gyunggi-do, KR;
Tae Joon Park, Daejeon, KR;
Sang Kee Yoon, Gyunggi-do, KR;
Hyung Jae Park, Gyunggi-do, KR;
Yeong Gyu Lee, Gyunggi-do, KR;
Heung Woo Park, Gyunggi-do, KR;
Samsung Electro-Mechanics Co., Ltd., Gyunggi-Do, KR;
Abstract
Disclosed herein is a method of manufacturing an inertial sensor. The method of manufacturing an inertial sensorincludes (A) applying a polymerto a base substrate, (B) patterning the polymerso as to form an opening partin the polymer, (C) completing a capby forming a cavityon the base substrateexposed fro the opening partthrough an etching process in a thickness direction, and (D) bonding the capto a device substrateby using a polymer, whereby the polymeris applied to the base substratein a constant thickness D, such that the capmay be easily bonded to the device substrateby using the polymer