The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2013
Filed:
Jul. 12, 2010
Eugene Maria Brinkhof, Weert, NL;
Joannes Hendricus Maria Van Oers, Valkenswaard, NL;
Robertus Adolphus Maria Kuipers, Helmond, NL;
Vasco Francisco Bovée, Waalre, NL;
Eugene Maria Brinkhof, Weert, NL;
Joannes Hendricus Maria Van Oers, Valkenswaard, NL;
Robertus Adolphus Maria Kuipers, Helmond, NL;
Vasco Francisco Bovée, Waalre, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus includes a heat transfer assembly configured to temperature control at least a portion of the lithographic apparatus. The heat transfer assembly includes a printed circuit board, and a plurality of heat transfer elements. The printed circuit board and the plurality of heat transfer elements are configured to be attached to the portion of the lithographic apparatus. The plurality of heat transfer elements are separate from and are electrically coupled to the printed circuit board.