The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2013
Filed:
Jun. 26, 2012
Cliff Bugge, Portland, OR (US);
Greg Clark, Hillsboro, OR (US);
Todd Hanson, Beaverton, OR (US);
Scott Edward Fuller, Portland, OR (US);
Jason Donald, Portland, OR (US);
Cliff Bugge, Portland, OR (US);
Greg Clark, Hillsboro, OR (US);
Todd Hanson, Beaverton, OR (US);
Scott Edward Fuller, Portland, OR (US);
Jason Donald, Portland, OR (US);
FEI Company, Hillsboro, OR (US);
Abstract
A method and system for forming and using a fiducial on a sample to locate an area of interest on the sample, the method comprising forming a fiducial by depositing a block of material on a sample proximal to an area of interest on the sample, the block of material extending from the surface of the sample to a detectable extent above the surface of the sample; and milling, using a charged particle beam, a predetermined pattern into at least two exposed faces of the block of material; subsequent to forming the fiducial, detecting the location of the area of interest by detecting the location of the fiducial; and subsequent to detecting the location of the area of interest, imaging or milling the area of interest with a charged particle beam.