The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2013
Filed:
Nov. 15, 2011
Thomas Jasinski, Munich, DE;
Thomas Jasinski, Munich, DE;
Abstract
A valve unit configured for a charged particle beam device having a beam pathis described. The valve unit includes a vacuum sealed valve housingconfigured for a pressure difference between the inside of the valve housing and the outside of the valve housing, wherein the housing provides a beam path portionfor having a charged particle beam pass therethrough along the beam path, a valve positioning unit adapted for selectively providing a first movement of the valve housing such that the beam path portion is selectively moved into and out of the beam path, and at least one sealing elementconfigured for a second movement, wherein the second movement is different from the first movement.