The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8500974 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 06, 2013

Filed:

Jun. 17, 2010
Applicant:

Chung-pei Wang, Taipei Hsien, TW;

Inventor:

Chung-Pei Wang, Taipei Hsien, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/00 (2006.01); C25B 9/00 (2006.01); C25B 11/00 (2006.01); C25B 13/00 (2006.01); B23Q 3/00 (2006.01); B25B 1/00 (2006.01); B25B 1/04 (2006.01); B25B 1/08 (2006.01); B25B 1/02 (2006.01); B25B 5/02 (2006.01); B25B 5/06 (2006.01); B25B 1/06 (2006.01); B43L 5/02 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
Abstract

A carrier for use during sputtering includes a main body and support members. The main body defines a receiving space and includes a lateral surface defining at least one groove extending along a longitudinal direction. The receiving space and the at least one groove communicate with each other. The at least one groove is defined by a first surface and a second surface. The first surface defines recessed portions along the longitudinal direction and communicates with the receiving space. The support members are used for hanging workpieces. Each of the support members includes at least one support arm protruding from the lateral surface and is selectively and movably retained by one of the recessed portions.


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