The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 30, 2013

Filed:

Jun. 02, 2010
Applicants:

Alex Kalnitsky, San Francisco, CA (US);

Hsiao-chin Tuan, Judong County, TW;

Kuo-ming Wu, Hsinchu, TW;

Wei Tsung Huang, Hsinchu, TW;

Inventors:

Alex Kalnitsky, San Francisco, CA (US);

Hsiao-Chin Tuan, Judong County, TW;

Kuo-Ming Wu, Hsinchu, TW;

Wei Tsung Huang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
Abstract

The process methods and structures mentioned above for creating a trench MOSFET enables self-aligned contacts to be formed to allow decreasing pitch size for trench MOSFET. The self-aligned contacts are formed by etching exposed silicon areas without using lithographical mask and alignment. As a result, the allowance for alignment can be saved and the pitch size can be decreased.


Find Patent Forward Citations

Kalnitsky, Alex. (2013). Self-aligned contact for trench mosfet (U.S. Patent No. 8497551). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8497551

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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