The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2013
Filed:
Nov. 16, 2009
Gerhard Schubert, Jena, DE;
Christian Jackel, Droyssig, DE;
Ulf-carsten Kirschstein, Jena, DE;
Michael Boehm, Jena, DE;
René Bauer, Jena, DE;
Gerd Harnisch, Jena, DE;
Thomas Peschel, Jena, DE;
Stefan Risse, Jena, DE;
Christoph Schenk, Jena, DE;
Gerhard Schubert, Jena, DE;
Christian Jackel, Droyssig, DE;
Ulf-Carsten Kirschstein, Jena, DE;
Michael Boehm, Jena, DE;
René Bauer, Jena, DE;
Gerd Harnisch, Jena, DE;
Thomas Peschel, Jena, DE;
Stefan Risse, Jena, DE;
Christoph Schenk, Jena, DE;
Vistec Electron Beam GmbH, Jena, DE;
Abstract
A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units () are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units () are constructed at least partially as swivel joints, and a push rod () which is actuated by a drive () for guiding the moving table laterally is connected to the rotating part () of each swivel joint, and in that the push rods () are hollow and constitute a component part of the suction lines for extracting the operating gas.