The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2013
Filed:
Sep. 20, 2011
Todd C. Bailey, Poughkeepsie, NY (US);
Daniel S. Fischer, Wappingers Falls, NY (US);
Dongbing Shao, Wappingers Falls, NY (US);
Todd C. Bailey, Poughkeepsie, NY (US);
Daniel S. Fischer, Wappingers Falls, NY (US);
Dongbing Shao, Wappingers Falls, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method for edge correction in pattern recognition includes generating a pattern recognition output for a pattern recognition process, including receiving, in the processor, a design layout, receiving a sample plan based on the design layout, receiving a first user-generated edge input, generating a pattern recognition recipe output from the design layout, the sample plan and the user-generated edge input, wherein the pattern recognition recipe output is configured to drive the pattern recognition process, generating a measurement model from the pattern recognition process, generating a measurement model pattern recognition output for an measurement model pattern recognition process, including receiving a second user-generated input and generating a measurement model pattern recognition recipe output from the measurement model and the second user-generated edge input, wherein the measurement model pattern recognition recipe output configured to drive the measurement model pattern recognition process.