The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2013
Filed:
Feb. 06, 2012
Takashi Ando, Hitachi, JP;
Susumu Komoriya, Tokorozawa, JP;
Masahiko Ogino, Hitachi, JP;
Akihiro Miyauchi, Hitachi, JP;
Takashi Ando, Hitachi, JP;
Susumu Komoriya, Tokorozawa, JP;
Masahiko Ogino, Hitachi, JP;
Akihiro Miyauchi, Hitachi, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
In order to allow for aligning a relative position between a transferred object and a stamper with high accuracy without providing an alignment pattern in the transferred object, there are provided: a pattern transfer method, including: when adjusting the relative position between the stamper and the transferred object, a step of detecting at least two or more edge positions of the transferred object and calculating an arbitrary point from the detected edge positions; a step of detecting a position of the stamper from an edge of the stamper or an alignment mark formed in the stamper; and a step of adjusting the relative position between the transferred object and the stamper from the arbitrary point and the position of the stamper; and an imprint device using the same.