The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2013
Filed:
Sep. 01, 2011
Haim Feldman, Nof-Avalon, IL;
Boris Morgenstein, Tel-Aviv, IL;
Roman Naidis, Rehovot, IL;
Adam Baer, Kfar Uriyah, IL;
Haim Feldman, Nof-Avalon, IL;
Boris Morgenstein, Tel-Aviv, IL;
Roman Naidis, Rehovot, IL;
Adam Baer, Kfar Uriyah, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.