The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2013

Filed:

Oct. 14, 2004
Applicants:

Ji Zhu, El Cerrito, CA (US);

Jeff Grunes, Aloha, OR (US);

Yang-kyu Choi, Albany, CA (US);

Jeffrey Bokor, Oakland, CA (US);

Gabor Somorjai, Berkeley, CA (US);

Inventors:

Ji Zhu, El Cerrito, CA (US);

Jeff Grunes, Aloha, OR (US);

Yang-Kyu Choi, Albany, CA (US);

Jeffrey Bokor, Oakland, CA (US);

Gabor Somorjai, Berkeley, CA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/285 (2006.01); H01L 21/302 (2006.01); H01L 27/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Fabrication methods disclosed herein provide for a nanoscale structure or a pattern comprising a plurality of nanostructures of specific predetermined position, shape and composition, including nanostructure arrays having large area at high throughput necessary for industrial production. The resultant nanostracture patterns are useful for nanostructure arrays, specifically sensor and catalytic arrays.


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