The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Oct. 25, 2010
Giora Dishon, Jerusalem, IL;
Moshe Finarov, Rehovot, IL;
Zvi Nirel, Mevaseret Zion, IL;
Yoel Cohen, Nes Ziona, IL;
Giora Dishon, Jerusalem, IL;
Moshe Finarov, Rehovot, IL;
Zvi Nirel, Mevaseret Zion, IL;
Yoel Cohen, Nes Ziona, IL;
Nova Measuring Instruments Ltd., Rehovot, IL;
Abstract
A system for determining at least two properties of a substrate, including a supporting plate configured to support the substrate, and a measurement device coupled to the supporting plate, including an illumination system configured to direct light toward a surface of the substrate, and a detection system coupled to the illumination system and configured to detect light propagating from the surface of the substrate, wherein the measurement device is configured to generate one or more output signals in response to the detected light, and a control unit coupled to the measurement device and configured to determine a first property and a second property of the substrate from the one or more output signals, wherein the first property comprises a presence of macro defects on the substrate, and wherein the second property comprises overlay misregistration in the substrate.