The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 2013

Filed:

Mar. 06, 2008
Applicants:

Shyama P. Mukherjee, Cary, NC (US);

Mark L. F. Phillips, Albuquerque, NM (US);

Travis P. S. Thoms, Bosque Farms, NM (US);

Inventors:

Shyama P. Mukherjee, Cary, NC (US);

Mark L. F. Phillips, Albuquerque, NM (US);

Travis P. S. Thoms, Bosque Farms, NM (US);

Assignee:

SBA Materials, Inc., Albuquerque, NM (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 (2006.01); B05D 3/00 (2006.01); C23C 14/02 (2006.01); H01G 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of fabrication of high-k paraelectric metal oxide films at low temperatures utilizing ordered mesoporous metal oxide thin films synthesized by organic templating methodology. The process consisting of (a) chemical solution deposition of periodic ordered mesoporous structures containing high-k metal oxide films, (b) removal of organic template additives, (c) infiltration of the pores with an appropriate second phase, and (d) low temperature thermal and/or annealing of infiltrated films.


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