The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
May. 10, 2007
Applicant:
Yasufumi Nishii, Kumagaya, JP;
Inventor:
Yasufumi Nishii, Kumagaya, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/52 (2006.01);
U.S. Cl.
CPC ...
Abstract
An exposure apparatus comprises a first member, which is arranged so as to oppose a surface of a substrate, and between which and the surface of the substrate a liquid immersion space is formed; and a second member, which traps liquid that is present at the surface of the substrate. A distance between the second member and the substrate is smaller than a distance between the first member and the substrate.