The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Jan. 26, 2009
Makoto Kobayashi, Nirasaki, JP;
Kenichi Yamaga, Nirasaki, JP;
Ken Nakao, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A thermal processing furnace comprises: a tubular heat insulation membersurrounding a processing vesselfor receiving and thermally processing an object to be processed w; a heating resistorhelically arranged on an inner circumferential surface of the heat insulation member; and a support memberdisposed on the inner circumferential surface of the heat insulation member, the support membersupporting the heating resistorsuch that the heating resistorcan be thermally expanded and thermally shrunk. The thermal processing furnace further comprises: a movement prevention memberdisposed on the heating resistorto be in contact with one side surface of the support memberso as to prevent a downward movement of the heating resistor