The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Oct. 04, 2010
Takashi Kamizono, Kawasaki, JP;
Toshiro Morita, Kawasaki, JP;
Atsushi Murota, Kawasaki, JP;
Motoki Takahashi, Kawasaki, JP;
Katsuya Tanitsu, Kawasaki, JP;
Takaaki Hirai, Kawasaki, JP;
Takashi Kamizono, Kawasaki, JP;
Toshiro Morita, Kawasaki, JP;
Atsushi Murota, Kawasaki, JP;
Motoki Takahashi, Kawasaki, JP;
Katsuya Tanitsu, Kawasaki, JP;
Takaaki Hirai, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
An embodiment of the present invention relates to a diffusing agent composition used in printing an impurity-diffusing component onto a semiconductor substrate, wherein the diffusing agent composition contains: a hydrolysis product of alkoxysilane (A); a component (B) containing at least one selected from the group consisting of a hydrolysis product of alkoxy titanium, a hydrolysis product of alkoxy zirconium, titania fine particle, and zirconia fine particle; an impurity-diffusing component (C); and an organic solvent (D).