The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
May. 10, 2011
Method and device for measuring the thickness of thin layers over large-area surfaces to be measured
Helmut Fischer, Oberaegeri, CH;
Helmut Fischer, Oberaegeri, CH;
Helmut Fischer GmbH Institut fuer Elektronik und Messtechnik, Sindelfingen, DE;
Abstract
The invention relates to a method and a device for measuring the thickness of thin layers over large-area surfaces to be measured (), in which at least one measuring probe (), which comprises at least one sensor element () and at least one contact spherical cap () associated with the sensor element (), is applied to the surface to be measured () in order to obtain a measured value, wherein the large-area surface to be measured () is subdivided into individual partial areas (), a matrix of measurement points () is determined for each partial area () to be inspected, measured values are ascertained at equidistant measurement points () along at least one row () of the matrix of the partial area () using a device () carrying the at least one measuring probe (), and the measured values are ascertained successively for all rows () in the matrix in the partial area () and evaluated for this partial area ().