The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Dec. 22, 2010
Josef Biberger, Wildenberg, DE;
Ralph Pulwey, Aalen, DE;
Ernst Draszba, Wittislingen, DE;
Klaus Hegele, Aalen, DE;
Harald Niebel, Oberkochen, DE;
Andreas Adolf, Aalen, DE;
Rainer Arnold, Ulm, DE;
Josef Biberger, Wildenberg, DE;
Ralph Pulwey, Aalen, DE;
Ernst Draszba, Wittislingen, DE;
Klaus Hegele, Aalen, DE;
Harald Niebel, Oberkochen, DE;
Andreas Adolf, Aalen, DE;
Rainer Arnold, Ulm, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A method for producing a representation of an object using a particle beam, as well as a particle beam device for carrying out the method are disclosed. The system described herein is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.