The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Nov. 24, 2009
Applicants:
Kai Frohberg, Niederau, DE;
Uwe Griebenow, Markkleeberg, DE;
Katrin Reiche, Goltzscha, DE;
Heike Berthold, Hirschfeld, DE;
Inventors:
Kai Frohberg, Niederau, DE;
Uwe Griebenow, Markkleeberg, DE;
Katrin Reiche, Goltzscha, DE;
Heike Berthold, Hirschfeld, DE;
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 21/338 (2006.01);
U.S. Cl.
CPC ...
Abstract
During a replacement gate approach, the inverse tapering of the opening obtained after removal of the polysilicon material may be reduced by depositing a spacer layer and forming corresponding spacer elements on inner sidewalls of the opening. Consequently, the metal-containing gate electrode material and the high-k dielectric material may be deposited with enhanced reliability.