The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Nov. 22, 2010
Ming-ching Wu, Taipei County, TW;
Chih-kung Huang, Taipei County, TW;
Jeff Biar, Taipei County, TW;
Kazuhiro Okada, Ageo, JP;
Ming-Ching Wu, Taipei County, TW;
Chih-Kung Huang, Taipei County, TW;
Jeff Biar, Taipei County, TW;
Kazuhiro Okada, Ageo, JP;
Domintech Co., Ltd., Taipei County, TW;
Other;
Abstract
A MEMS sensor capable of sensing acceleration and pressure includes a frame, a proof mass and flexible bridges connected between the frame and the proof mass in such a way that the proof mass is moveably suspended inside the frame. The proof mass is provided with a pressure sensing diaphragm and a sealed chamber corresponding to the diaphragm such that the proof mass is not only served as a moveable sensing element for acceleration measurement but also a pressure sensing element.