The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2013
Filed:
Apr. 08, 2011
Applicants:
Sung-il Cho, Asan-si, KR;
Ho-tae Jin, Cheonan-si, KR;
Heui-seog Kim, Asan-si, KR;
Seon-ju OH, Cheonan-si, KR;
Inventors:
Sung-il Cho, Asan-si, KR;
Ho-tae Jin, Cheonan-si, KR;
Heui-seog Kim, Asan-si, KR;
Seon-ju Oh, Cheonan-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/268 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for processing a substrate includes generating a first laser beam, splitting the first laser beam into a plurality of second laser beams, focusing the split second laser beams on a plane in the substrate parallel to a main surface of the substrate, and performing surface separation of the substrate along the plane.