The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2013
Filed:
Apr. 30, 2010
Tao Feng, Santa Clara, CA (US);
Tao Feng, Santa Clara, CA (US);
Alpha & Omega Semiconductor, Inc., Sunnyvale, CA (US);
Abstract
A thin and stackable power MOSFET (SP-MOSFET) and method are proposed. The SVP-MOSFET includes semiconductor substrate with bottom drain metal layer. Formed atop the semiconductor substrate are trenched gate regions and source-body regions. A patterned gate metal layer and source-body metal layer respectively contact trenched gate regions and source-body regions. At least one of through substrate drain via (TSDV), through substrate gate via (TSGV), through substrate source via (TSSV) is provided. The TSDV, formed through semiconductor substrate and in contact with drain metal layer, has top drain contacting pad and bottom drain contacting pad for making top and bottom contacts thereto. Similarly the TSGV, formed through semiconductor substrate and in contact with gate metal layer, has top gate contacting pad and bottom gate contacting pad. Likewise the TSSV, formed through semiconductor substrate and in contact with source-body metal layer, has top source contacting pad and bottom source contacting pad.