The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2013
Filed:
Sep. 11, 2008
Joachim N. Burghartz, Leinfelden-Echterdingen, DE;
Wolfgang Appel, Schwieberdingen, DE;
Martin Zimmermann, Stuttgart, DE;
Joachim N. Burghartz, Leinfelden-Echterdingen, DE;
Wolfgang Appel, Schwieberdingen, DE;
Martin Zimmermann, Stuttgart, DE;
Institut fuer Mikroelektronik Stuttgart, Stuttgart, DE;
Abstract
In a method for producing a very thin chip including an integrated circuit, a circuit structure is produced in a defined section of a semiconductor wafer. The defined wafer section is subsequently released from the semiconductor wafer. For this purpose, the wafer section is firstly freed such that it is held only via local web-like connections on the remaining semiconductor wafer, which web-like connections are arranged at a lateral periphery of the wafer section. The web-like connections are subsequently severed.